• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The invention relates to a method for coating a substrate (16) with a lacquer, comprising the following steps: the lacquer is sprayed onto the substrate (16), then the lacquer applied to the substrate (16) is sprayed with solvent. The invention further relates to a coating system for the coating of substrates.
    公开号:AT516291A2
    申请号:T50787/2015
    申请日:2015-09-15
    公开日:2016-04-15
    发明作者:
    申请人:Suss Microtec Lithography Gmbh；
    IPC主号:
    专利说明:

    The invention is directed to a process for coating a substrate with a varnish and to a coating system for varnishing substrates.
    In microfabrication processes, lacquers are usually used, which are applied to the substrate to be processed in one layer. With the help of these paints, for example, B. masks are produced on the substrates, with the help of which a desired structure can be produced on the substrate or processing can take place. For this purpose, for example, the lacquers are photosensitive, so that the desired structure can be transferred from a photomask to the photosensitive lacquer by means of an optical imaging.
    For optimum results, it is extremely important that the applied paint layer be free of bumps and particles. In addition to rotation methods, spray methods are also used to apply the paint to the substrate, in which the paint is sprayed onto the substrate by means of a nozzle. Especially for substrates with topographies, i. Substrates, which themselves already have vertical, three-dimensional structures on their surface, can be achieved as effectively as possible by spraying the paint on a coating layer which is as homogeneous as possible.
    However, when spraying the paint, paint particles form on the paint layer because a certain number of paint drops dries during flight between the nozzle and substrate and then already impinges on the surface of the substrate or paint there as (almost) cured paint particles. These paint particles accumulate on the sprayed lacquer layer and lead to problems in further processing, for example during exposure, and finally to local defects in the structures produced.
    It is an object of the invention to provide a method and a device in which the paint layer applied to the substrate is flat and free of paint particles.
    The object is achieved by a method for coating a substrate with a paint, in which the paint is sprayed onto the substrate and the paint applied to the substrate is subsequently sprayed with solvent.
    Subsequent spraying of the applied lacquer with solvent flattens the unevennesses formed on the substrate and dissolves the lacquer particles deposited on the substrate so that the surface of the substrate is level and (at least for the most part) free of lacquer particles.
    The term "paint" in this context means a mixture of a solvent and a suitable for the desired application paint.
    Preferably, the solvent is sprayed locally on the applied paint, whereby a targeted after-treatment of the paint is possible.
    In one embodiment, between the spraying of the paint and the spraying of the applied paint with solvent, the solvent content of the applied paint is reduced so much that the applied paint solidifies. Here, the term "solidification" is to be understood that the viscosity of the applied paint is increased such that the applied paint does not flow until further processing. Especially with substrates with topographies, it is important that the varnish solidifies so that edges and slopes of the substrate reliably remain covered with varnish.
    The solvent content of the applied paint must be maintained until and during the spraying with the solvent in a range in which on the one hand, the viscosity of the applied paint is sufficiently large, so that the paint no longer flows. On the other hand, the solvent content must not have been reduced so much that the paint particles or unevennesses can no longer be dissolved or leveled when sprayed with solvent.
    Preferably, the substrate and / or the applied paint is heated during and / or after spraying of the paint, whereby the solvent content of the applied paint can be reduced in a simple manner.
    In one embodiment of the invention, the paint is sprayed onto the substrate according to a predetermined spray pattern, preferably in parallel paths, whereby the solvent is also sprayed onto the applied paint according to the spray pattern. In this way it can be ensured that the applied paint is completely sprayed with solvent ,
    Preferably, the time between the time that the paint is sprayed at a location on the substrate and the time that this location is sprayed with the solvent is constant, thereby ensuring that the applied paint will always have the same amount of solvent when combined with the solvent Solvent is sprayed.
    In one embodiment of the invention, the paint is sprayed onto the substrate by means of a paint nozzle, and the solvent is sprayed by means of a solvent jet separate from the paint nozzle, whereby the substrate can be quickly and efficiently lacquered.
    Preferably, the paint nozzle and the solvent nozzle are moved above the substrate parallel to the substrate, in particular simultaneously, so that only one drive mechanism is required for both nozzles.
    According to a preferred embodiment it is provided that, when the paint nozzle and the solvent nozzle are moved, the solvent nozzle follows the path of the paint nozzle, so that it is ensured that the sprayed paint is then sprayed with solvent.
    In one embodiment, the paint nozzle and the solvent nozzle are moved in at least one plane parallel to the substrate in parallel paths above the substrate, wherein the distance between the paint nozzle and the solvent nozzle twice or an even multiple of the distance of the webs, on the one hand a simple spray pattern is used and on the other hand it is ensured that the solvent nozzle takes the same path as the paint nozzle.
    In one embodiment of the invention, if a plurality of paint coats are to be applied to the substrate, spraying of the applied paint with solvent takes place after spraying the last paint coat, so that unevenness and paint particles of the last applied paint coat are leveled or removed.
    When spraying the last lacquer layer, the lacquer may have a larger solvent content than the lacquer of the previously sprayed on lacquer layer. In this way it is ensured that the solvent content of the sprayed-on paint is not reduced until the spraying of the sprayed-on paint with solvent is so great that the removal of paint particles and unevenness is no longer possible.
    Even if only a single coat of paint is sprayed onto the substrate, the solvent content of the paint used may be higher than would be the case in conventional spray-coating processes without subsequent solvent spraying.
    In one embodiment of the invention, the applied paint is sprayed several times with solvent to further improve the quality of the surface of the applied paint.
    The solvent may be acetone or methyl ethyl ketone, whereby known solvents can be used.
    The object is further achieved by a coating system for coating substrates, in particular substrates with topographies, with a substrate holder, a
    Paint nozzle, a solvent nozzle and a moving device, at which the paint nozzle and the solvent nozzle are arranged at a certain distance from each other, wherein the paint nozzle and the solvent nozzle are movable together by means of a moving device above the substrate holder. Due to the separate solvent nozzle, which is movable together with the paint nozzle, it is possible to spray the paint applied to the substrate in the same process step with solvent and so dissolve the paint particles that have accumulated on the applied paint and any bumps that have arisen during spraying to level.
    Preferably, the coating equipment has a heating device, in particular the substrate holder is provided with a heating element, whereby the solvent content of the applied paint can be reduced in a simple way.
    In an embodiment, it is provided that the movement device moves the paint nozzle and the solvent nozzle in at least one plane parallel to the substrate holder in parallel paths above the substrate holder, wherein the distance between the paint nozzle and the solvent nozzle corresponds to twice or an even multiple of the distance of the webs.
    The spacing of the tracks may correspond approximately to the diameter of the paint jet produced by the paint nozzle on the substrate to be coated, whereby a particularly efficient coating of the substrate is possible since no location of the substrate is omitted or sprayed several times.
    Preferably, as the paint and solvent nozzles travel in parallel paths, they are then offset from each other across the length of the webs by the spacing of the webs when both the solvent and paint nozzles or both jets produced by the nozzles have reached or already moved beyond the edge of the substrate have been.
    Adjacent tracks are each lowered in opposite directions of movement.
    Further features and advantages will become apparent from the following description as well as the accompanying drawings, to which reference is made. In the drawings show:
    Figure 1 schematically a coating system according to the invention in a
    Side View,
    2 shows the coating installation according to FIG. 1 schematically in a plan view, and FIGS. 3a to 3c show schematically in section a substrate to be coated at different times of the method according to the invention.
    FIG. 1 schematically shows a coating system 10 which serves for coating and treating a substrate. The substrate is, for example, a semiconductor, which is further processed later.
    The coating machine 10 has a substrate holder 12 and a moving device 14.
    On the substrate holder 12, a substrate 16 may be arranged, which can be coated by means of the coating system 10 with a paint.
    The substrate holder 12 is preferably equipped with a heating element 18, which constitutes a heating device for the coating installation 10.
    By means of the heating element, the substrate 16 and thus the paint applied to the substrate can be heated.
    On the moving device 14, two nozzles are provided, namely a paint nozzle 20 and a solvent nozzle 22, which are arranged at a certain distance a to each other. The distance a refers to the distance between the outlet openings of the Lackdüse20 and the solvent nozzle 22nd
    The paint nozzle 20 and the solvent nozzle 22 are disposed above the substrate 16, d. H. on the side of the substrate 16 facing away from the substrate holder 12. Accordingly, the paint nozzle 20 and the solvent nozzle 22 are also provided above the substrate holder 12.
    The movement device 14 also has actuators 24, by means of which the paint nozzle 20 and the solvent nozzle 22 can be moved.
    In the embodiment shown, the paint nozzle 20 and the solvent nozzle 22 may be moved by means of the moving device 14 along the three axes X, Y, Z, which span the space above the substrate 16 and the substrate holder 12, in particular in a plane which is different from the X axis. Axis and the Y-axis is clamped. If required, it can additionally be provided that the distance of the nozzles from the substrate is changed, that is, the nozzles are adjusted relative to the substrate in the Z direction.
    In particular, the paint nozzle 20 and the solvent nozzle 22 are rigidly disposed on the moving device 14 without changing the distance a between the nozzles 20, 22. However, it is also conceivable that the distance a is variable, making the coating installation 10 more flexible.
    For coating the substrate 16, paint is first sprayed onto the substrate 16 using the paint nozzle 20. In Figure 3a, the substrate 16 is partially sectioned before spraying with paint.
    In FIG. 3 b, the paint nozzle 20 has passed the location shown in FIG. 3 a and sprayed paint onto this location of the substrate 16. On the substrate 16 is now a lacquer layer26.
    This lacquer layer 26, d. H. the applied paint, however, may include bumps 28 and paint particles 30 formed when the substrate 16 is sprayed.
    In order to prevent flow of the paint applied to the substrate 16, the substrate 16 and thus the lacquer layer 26 applied to the substrate 16 can be heated. Thereby, solvent evaporates from the lacquer, so that the solvent content of the lacquer is reduced and the viscosity of the lacquer increases. In this way it is ensured that the applied varnish solidifies. "Solidification" does not mean that the varnish has completely dried, but that its fluidity has only decreased to such an extent that it no longer flows in undesired way. Especially for substrates with vertical topographies, which have steep edges and bevels, it is important that the applied lacquer solidify as quickly as possible so that the lacquer applied does not drain off the edges and higher sections leaving those locations with very little or no lacquer.
    After the varnish has been sprayed onto the substrate 16, the solvent jet 22 separated from the varnish nozzle 20 passes the just scrubbed area and sprays the varnish layer 26 with solvent.
    In this case, the solvent jet generated by the solvent jet 22 has a limited diameter, so that the lacquer layer 26 is locally, i. in places, sprayed with solvent.
    The duration between the time that the paint is sprayed on a location of the substrate 16 and the time at which this location is sprayed with the solvent is constant for each location of the substrate 16.
    The sprayed-on solvent dissolves the lacquer particles 30 present on the lacquer layer 26 and combines uniformly with the lacquer layer 26. In addition, unevennesses 28 of the lacquer layer 26 are leveled.
    In this way, a flat lacquer layer 26, as shown in Figure 3c.
    For spraying the paint onto the substrate 16, the paint nozzle 20 is moved above the substrate 16. The movement follows a predetermined path, and the Lackdüse20 thus departs a predetermined spray pattern.
    The solvent nozzle 22 is moved simultaneously with the paint nozzle 20, but dabeium the distance a is offset. The position of the solvent jet 22 to the paint nozzle 20, in particular the distance a, is chosen so as to match the spray pattern so that the solvent jet 22 follows the path of the paint nozzle 20 and thus leaves the same spray pattern.
    It is sufficient if the path of the solvent nozzle 22 coincides with the path of the paint nozzle 20 only above the substrate 16.
    Accordingly, the varnish and the solvent are applied according to the same spray pattern.
    To illustrate a possible spray pattern, the substrate 16 to be coated, the paint nozzle 20 and the solvent nozzle 22 are shown in plan view in FIG. For reasons of clarity, the movement device 14 is not shown.
    The broken line shows the path of the paint nozzle 20, the dotted line represents the path of the solvent nozzle 22. The positions of the paint nozzle 20 and the solvent nozzle 22 at the beginning of the coating process are indicated as rectangles. The positions of the paint nozzle 20 and the solvent nozzle 22 at the end of the coating process are indicated by a dashed or dotted rectangle.
    The paint nozzle 20 and the solvent nozzle 22 are moved by the movement device 14 in parallel paths B above the substrate 16 and the substrate holder 12, respectively.
    The movement takes place in a plane parallel to the substrate 16 or to the substrate holder 12. For example, in a plane which is spanned by the X and Y axes.
    The height of the nozzles 20, 22 along the Z axis is selected such that the distance b of the webs B corresponds approximately to the diameter of the paint jet generated by the paint nozzle 20 on the substrate 16 to be coated.
    The diameter of the solvent jet produced by the solvent jet 22 preferably has the same diameter on the substrate 16 as the paint jet.
    In the embodiment shown in Figure 2, the distance a between the paint nozzle 20 and the solvent nozzle 22 is approximately twice the distance b.
    Of course, the distance a may also be another even multiple of the distance b.
    The webs B are alternately traversed in opposite directions, for example, parallel to the Y-axis. Adjacent tracks B are traversed with opposite directions of movement.
    Once both the paint nozzle 20 and the solvent nozzle 22 and the jets generated by the nozzles 20, 22 have reached the edge of the substrate 16 or have already been moved beyond the edge of the substrate 16, the movement in the Y direction is stopped, and the two nozzles 20, 22 are offset by the distance b of the webs B along the X-axis.
    Subsequently, the nozzles 20, 22 are moved along the Y-axis in the opposite direction to the previous movement in the Y-direction, until also both the paint nozzle 20 and the solvent nozzle 22 or the jets generated by the nozzles 20, 22 reaches the edge of the substrate 16 or have already been traded.
    The movement of the solvent nozzle 22, given by the ratio of the distances a and b, takes place along the same paths B as the movement of the paint nozzle 20, so that the solvent nozzle 22 follows the path of the paint nozzle 20.
    The coating process is completed as soon as both the paint nozzle 20 and the solvent jet 22 have completely run off the substrate 16. This means that the entire surface of the substrate 16 was scanned with the paint or solvent jet.
    The paint nozzle 20 and the solvent nozzle 22 are now in their final position, as shown in Figure 2 as dashed or dotted rectangle.
    Because the paint nozzle 20 is rigidly coupled to the solvent nozzle 22, in the described embodiment, the first two webs B of the solvent nozzle 22 at the beginning of the coating process in plan next to the substrate 16 and the substrate holder 12, whereas the last two paths B of the paint nozzle 20 at end of
    Coating process in plan view next to the substrate 16 and the substrate holder 12verlaufen. While the paint nozzle 20 and the solvent nozzle 22 are moved over the substrate, 20 paint is sprayed from the paint nozzle and solvent from the solvent 22.
    In this case, the paint may be a mixture of solvent and pure paint, for example a photoresist, so that the term "paint" is understood to mean a paint / solvent mixture.
    The solvent used may be acetone or methyl ketone. However, other solvents or mixtures of solvents which can dissolve the lacquer used are also conceivable.
    Preferably, the paint nozzle 20 and the solvent nozzle 22 are aligned such that the beams generated by them do not overlap on the substrate. Rather, the rays may be adjacent to each other.
    In addition, while the paint nozzle 20 and the solvent nozzle 22 are moved above the substrate 16 and the substrate holder 12, respectively, the substrate holder 12 can be heated by the heater 18. In this way, the substrate 16 and the already sprayed on lacquer layer are heated.
    The coating process shown and in particular the spray pattern shown are only to be understood as examples. For example, it is also possible for the solvent nozzle 22 to follow the paint nozzle 20 immediately. In this case, the carrier to which they are placed must be rotated 180 ° at the end of each trajectory so that the solvent jet 22 is again "behind" the paint die 20 on the following trajectory.
    It is also conceivable that the applied lacquer is sprayed several times with solvent in order to further reduce the number of lacquer particles 30 and unevennesses 28 on the lacquer layer 26.
    It can also be provided that the paint and the solvent are sprayed from the same nozzle. In this case, the nozzle removes the substrate several times, spraying the paint in one pass and solvent in another pass.
    Of course, it is also possible to apply a plurality of resist layers on the substrate. In this case, the sprayed paint is sprayed with solvent after the last coat of paint has been sprayed on.
    In this case, the solvent content of the paint for spraying the last coat of paint can be selected to be greater than the solvent content of the paint previously used.
    In general, the solvent content of the paint, even if only one coat of paint is sprayed, be chosen to be greater than would be the case with a comparable spraying without subsequent subsequent spraying with solvent.
    权利要求:
    Claims (18)
    [1]
    Claims 1. A method of coating a substrate (16) with a lacquer, comprising the steps of: - spraying the lacquer onto the substrate (16), - then spraying the lacquer applied to the substrate (16) with solvent.
    [2]
    2. The method according to claim 1, characterized in that the solvent is sprayed locally on the applied paint.
    [3]
    A method according to claim 1 or 2, characterized in that between the spraying of the paint and the spraying of the applied paint with solvent, the solvent content of the applied paint is reduced to the extent that the applied paint solidifies.
    [4]
    4. The method according to any one of the preceding claims, characterized in that the substrate (16) and / or the applied paint during and / or after the spraying of the paint is heated.
    [5]
    A method according to any one of the preceding claims, characterized in that the paint is sprayed onto the substrate (16) in a predetermined spray pattern, preferably in parallel webs (B), the solvent also being sprayed onto the applied paint according to the spray pattern.
    [6]
    A method according to any one of the preceding claims, characterized in that the time between the time when the paint is sprayed at a location on the substrate and the time at which that location is sprayed with the solvent is constant.
    [7]
    A method according to any one of the preceding claims, characterized in that the paint is sprayed onto the substrate (16) by means of a paint nozzle (20) and the solvent is sprayed by means of a solvent nozzle (22) separate from the paint nozzle (20).
    [8]
    A method according to claim 7, characterized in that the paint nozzle (20) and the solvent jet (22) are moved above the substrate (16) parallel to the substrate (16), in particular simultaneously.
    [9]
    9. The method according to claim 8, characterized in that the solvent jet (22) follows the path of the paint nozzle (20) when the paint nozzle (20) and the solvent nozzle (22) move.
    [10]
    10. The method according to claim 8 or 9, characterized in that the paint nozzle (20) and the solvent nozzle (22) in at least one to the substrate (16) parallel plane in parallel tracks (B) are moved above the substrate (16), wherein the The distance (a) between the paint nozzle (20) and the solvent nozzle (22) is twice or even a multiple of the distance (b) of the webs (B).
    [11]
    11. The method according to any one of the preceding claims, characterized in that, if a plurality of paint layers are to be applied to the substrate (16), the spraying of the applied paint with solvent takes place after spraying the last coat of paint.
    [12]
    12. The method according to claim 11, characterized in that during the spraying of the last lacquer layer, the lacquer has a greater proportion of solvent than the lacquer of the previously sprayed lacquer layers.
    [13]
    13. The method according to any one of the preceding claims, characterized in that the applied paint is sprayed several times with solvent.
    [14]
    A method according to any one of the preceding claims, characterized in that the solvent is acetone or methyl ketone.
    [15]
    15. Coating installation for coating substrates (16), in particular substrates (16) with topographies, with a substrate holder (12), a paint nozzle (20), a solvent nozzle (22) and a movement device (14) on which the paint nozzle (20) andthe solvent jet (22) are arranged at a certain distance (a) from each other, wherein the paint jet (20) and the solvent jet (22) are jointly movable by means of a moving device (14) above the substrate holder (12).
    [16]
    16. Coating plant according to claim 15, characterized in that the coating installation (10) has a heating device, in particular the substrate holder (12) is provided with a heating element (18).
    [17]
    Coating plant according to claim 15 or 16, characterized in that the moving device (14) is arranged to project the paint nozzle (20) and the solvent jet (22) in at least one plane parallel to the substrate holder (12) in parallel paths (B) above the surface Substrate holder (12) can proceed, wherein the distance (a) between the paint nozzle (20) and the solvent nozzle (22) to twice or an even multiple of the distance (b) corresponds to the webs (B).
    [18]
    18. Coating plant according to one of claims 15 to 17, characterized in that the distance (b) of the webs (B) corresponds approximately to the diameter of the paint jet (20) generated paint jet on the substrate to be coated (16).
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    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    DE102014113927.5A|DE102014113927A1|2014-09-25|2014-09-25|Process for coating a substrate and coating system|
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